Reactive ionized physical vapor deposition of thin films
نویسندگان
چکیده
منابع مشابه
Simulation of Fabrication toward High Quality Thin Films for Robotic Applications by Ionized Cluster Beam Deposition
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ژورنال
عنوان ژورنال: The European Physical Journal Applied Physics
سال: 2011
ISSN: 1286-0042,1286-0050
DOI: 10.1051/epjap/2011110199